chemiresistive humidity sensing on MEMS device
Lu-HHTP coated MEMS humidity sensor · Electrode
Keithley-2400 connected MEMS devices for R-T testing; baseline at 11% RH LiCl saturated salt solution; exposed to 33%, 54%, 75%, 85% and 95% RH saturated salt solutions at room temperature
| Property | Reported value | Normalised value | Uncertainty | Origin and quality | Source |
|---|---|---|---|---|---|
| Repeatability cycles at 95% RH | 5 cycles under 95% RH and dry nitrogen | — | — | Caption Exact Reported | 3 · Figure caption · Figure 3C |
| Humidity response at 95% RHMarked as a best value within this paper | 19 at 95% RH | — | — | Text Exact Reported | 1 · Abstract · Figure 3B; Table S2 |
| Relative humidity detection rangeMarked as a best value within this paper | 33-95% RH | — | range | Text Range | 3 · Humidity Sensing Measurements of Lu-HHTP · Figure 3A-B |
| Recovery time at 95% RHMarked as a best value within this paper | 25 s | — | — | Text Exact Reported | 4 · Humidity Sensing Measurements of Lu-HHTP · Figure S5; Table S2 |
| Humidity response at 33% RH | approximately 1.0 at 33% RH | — | visual estimate | Figure Axis Approximate | 3 · Humidity Sensing Measurements of Lu-HHTP · Figure 3B |
| Humidity response at 54% RH | approximately 1.3 at 54% RH | — | visual estimate | Figure Axis Approximate | 3 · Humidity Sensing Measurements of Lu-HHTP · Figure 3B |
| Humidity response at 75% RH | approximately 2.5 at 75% RH | — | visual estimate | Figure Axis Approximate | 3 · Humidity Sensing Measurements of Lu-HHTP · Figure 3B |
| Humidity response at 85% RH | approximately 4.8 at 85% RH | — | visual estimate | Figure Axis Approximate | 3 · Humidity Sensing Measurements of Lu-HHTP · Figure 3B |
| Response time at 95% RHMarked as a best value within this paper | 36 s at 95% RH | — | — | Text Exact Reported | 4 · Humidity Sensing Measurements of Lu-HHTP · Figure S5; Table S2 |
| Humidity sensor stability monitoring duration | 30 days | — | — | Caption Exact Reported | 3 · Figure caption · Figure 3D |
| Approximate 30-day response range at 95% RH | approximately 17-19.5 over 30 days | — | visual estimate | Figure Axis Range | 3-4 · Humidity Sensing Measurements of Lu-HHTP · Figure 3D |
| Table S2 Lu-HHTP response/sensitivityMarked as a best value within this paper | 19 (95% RH) | — | — | SI Table Exact Reported | 8 · 2. Supplementary Figures and Tables · Table S2 |