Microscopy Morphology — Chemical Vapor Deposition of Edge-on Oriented 2D Conductive Metal-Organic Framework Thin Films

Measurement evidence

Microscopy Morphology

Chemical Vapor Deposition of Edge-on Oriented 2D Conductive Metal-Organic Framework Thin Films · Choe M., Koo J.Y., Park I. et al. · Journal of the American Chemical Society · 2022 · 16726-16731

3 measurement groups · 11 results

Reported values remain attached to the sample, method, conditions, extraction quality and source location that produced them.

Atomic force microscopy (AFM)

CVD Cu3(C6O6)2 thin film on SiO2/Si · Thin Film

AFM surface roughness for films of different thicknesses on SiO2/Si.

Context
pristine thin films
Measurement source
SI S14 · Figure S6 caption · Figure S6
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
RMS roughness Rq for 165.8 nm filmRq of 12.8 nmCaption
Exact Reported
SI S14 · Figure S6 caption · Figure S6
RMS roughness Rq for 55.0 nm filmRq of 9.87 nmCaption
Exact Reported
SI S14 · Figure S6 caption · Figure S6
RMS roughness Rq for 662.7 nm filmRq of 18.0 nmCaption
Exact Reported
SI S14 · Figure S6 caption · Figure S6

SEM and SEM-EDX mapping

CVD Cu3(C6O6)2 thin film on SiO2/Si · Thin Film

Surface SEM and elemental maps on Cu3(C6O6)2 thin film on SiO2/Si.

Context
pristine thin film
Measurement source
SI S15 · Figure S8 caption · Figure S8
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
SEM-EDX elemental homogeneityGood homogeneity in SEM images and SEM-EDX maps of Cu, O, and CText
Qualitative
main p002 / article page 16727 · Results · Figures S7-S8

AFM for very thin sample and alpha-step profilometry for other thicknesses

CVD Cu3(C6O6)2 thin film on SiO2/Si · Thin Film

Thickness controlled by precursor amount with Cu(acac)2:THQ mass ratio 3:1.

Context
pristine thin films
Measurement source
SI S13 · Figure S5 and Table S1 · Table S1
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
Average film thickness, blue film, Cu(acac)2 1.5 mg / THQ 0.5 mg55.0 nmSD 0.71 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1
Average film thickness, green film, Cu(acac)2 15 mg / THQ 5 mg248.2 nmSD 20.1 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1
Average film thickness, grey film, Cu(acac)2 45 mg / THQ 15 mg662.7 nmSD 17.2 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1
Average film thickness, orange film, Cu(acac)2 30 mg / THQ 10 mg373.8 nmSD 14.5 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1
Average film thickness, purple film, Cu(acac)2 6 mg / THQ 2 mg165.8 nmSD 9.04 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1
Average film thickness, red film, Cu(acac)2 4.5 mg / THQ 1.5 mg125.2 nmSD 10.2 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1
Average film thickness, yellow film, Cu(acac)2 3 mg / THQ 1 mg85.9 nmSD 3.65 nmSI Table
Exact Reported
SI S13 · Table S1 · Table S1