Photo imaging, SEM, and XRD confirmation of patterned oriented Cu3(BTC)2
Oriented Cu3(BTC)2 photolithographic patterns · Thin Film
Photolithographically patterned film on Si; SEM/photo images and XRD of oriented Cu3(BTC)2 patterns.
| Property | Reported value | Normalised value | Uncertainty | Origin and quality | Source |
|---|---|---|---|---|---|
| Pattern integrity during conversion | No pattern detachment observed | — | — | Text Qualitative | 19616 · 2.2 Oriented Cu3(BTC)2 patterns · Figure 3 |
| Possible oriented MOF pattern resolution based on Cu(OH)2 nanobelt width | up to 50 nm possible | 5e-8 m | — | Text Approximate | 19616 · 2.2 Oriented Cu3(BTC)2 patterns · Figure 3 |