Other — High-Performance H2S Sensors to Detect SF6 Leakage

Measurement evidence

Other

High-Performance H2S Sensors to Detect SF6 Leakage · Zhao X., Jiang S., Zhang Z. et al. · ACS Sensors · 2024 · 5512-5519

2 measurement groups · 10 results

Reported values remain attached to the sample, method, conditions, extraction quality and source location that produced them.

MEMS Au interdigitated electrode fabrication and SEM geometry inspection

Scanning electron microscopy

Co1.8Ni1.2(HITP)2 chemiresistive gas sensor on Au IDE chip · Electrode

4-inch silicon wafer, Cr/Au sputtering, LC100A lithography, ion beam etching and dicing into chips.

Geometry: 50 pairs of Cr/Au lines; chip dimensions 3 x 4.5 mm2; line width and spacing 10 um
Context: device substrate for target Co1.8Ni1.2(HITP)2 sensor
Measurement source: 3-4 · Au IDEs fabrication · Figure S13

Property	Reported value	Normalised value	Uncertainty	Origin and quality	Source
bare chip dimensions	3 x 4.5 mm2	—	—	Text Exact Reported	4 · 2.2. Chip Design and Fabrication · Figure 3b
Cr/Au thickness	30/100 nm	—	—	Text Exact Reported	3 · Au IDEs fabrication · Figure S13
number of Cr/Au line pairs	50 pairs	—	—	Text Exact Reported	4 · Au IDEs fabrication · Figure S13
IDE finger electrode spacing	10 um	—	—	Text Exact Reported	4 · 2.2. Chip Design and Fabrication · Figure 3d
IDE finger electrode width	10 um	—	—	Text Exact Reported	4 · 2.2. Chip Design and Fabrication · Figure 3d

ICP-OES metal molar ratio

Bulk elemental and compositional analysis

Co1.8Ni1.2(HITP)2 powder · Powder

As-prepared CoxNi3-x(HITP)2 bimetallic powders.

Context: mixed-metal composition verification
Measurement source: 22 · Table S1 · Table S1

Property	Reported value	Normalised value	Uncertainty	Origin and quality	Source
ICP-OES Co:Ni ratio for Co0.6Ni2.4(HITP)2	1:4.08	—	—	SI Table Exact Reported	22 · Table S1 · Table S1
ICP-OES Co:Ni ratio for Co1.2Ni1.8(HITP)2	2:2.95	—	—	SI Table Exact Reported	22 · Table S1 · Table S1
ICP-OES Co:Ni ratio for Co1.5Ni1.5(HITP)2	1:1.04	—	—	SI Table Exact Reported	22 · Table S1 · Table S1
ICP-OES Co:Ni ratio for Co1.8Ni1.2(HITP)2Marked as a best value within this paper	3.09:2	—	—	SI Table Exact Reported	22 · Table S1 · Table S1
ICP-OES Co:Ni ratio for Co2.4Ni0.6(HITP)2	3.91:1	—	—	SI Table Exact Reported	22 · Table S1 · Table S1