Sensing Application — ChemFET Sensor: nanorods of nickel-substituted Metal–Organic framework for detection of SO2

Measurement evidence

Sensing Application

ChemFET Sensor: nanorods of nickel-substituted Metal–Organic framework for detection of SO2 · Ingle N., Sayyad P., Bodkhe G. et al. · Applied Physics A: Materials Science and Processing · 2020 · 723

6 measurement groups · 30 results

Reported values remain attached to the sample, method, conditions, extraction quality and source location that produced them.

SO2 calibration curve and dynamic response/recovery timing

Ni3HHTP2 MOF ChemFET channel on Au/SiO2/Si · Electrode

Calibration for SO2 concentration; response/recovery at 875 ppb SO2 with Vgs = -2 V and Vds = 0.5 V.

Atmosphere
dry air dilution; room temperature
Geometry
Ni3HHTP2 ChemFET
Context
pristine Ni3HHTP2 MOF active channel
Measurement source
6 · 4 ChemFET sensing · Figs. 10-11; supplementary Fig. 2
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
SO2 calibration normalised DeltaI at 1125 ppbapproximately 0.47approx +/- 0.03Figure Axis
Approximate
7 · Figure page · Fig. 10
SO2 calibration normalised DeltaI at 625 ppbapproximately 0.00approx +/- 0.02Figure Axis
Approximate
7 · Figure page · Fig. 10
SO2 recovery time at 875 ppbMarked as a best value within this paper32 sText
Exact Reported
6 · 4 ChemFET sensing · Fig. 11
Response/recovery drain-source voltage0.5 VCaption
Exact Reported
7 · Figure caption · Fig. 11
Response/recovery gate voltage-2 VCaption
Exact Reported
7 · Figure caption · Fig. 11
SO2 response time at 875 ppbMarked as a best value within this paper13 sText
Exact Reported
6 · 4 ChemFET sensing · Fig. 11

ChemFET selectivity and sensitivity comparison against gases

Ni3HHTP2 MOF ChemFET channel on Au/SiO2/Si · Electrode

SO2, CO, C2H2, NO2 and CH4 at 625 ppb for selectivity; sensitivity plotted versus concentration.

Atmosphere
dry air dilution; room temperature
Geometry
Ni3HHTP2 ChemFET
Context
pristine Ni3HHTP2 MOF active channel
Measurement source
6 · 4 ChemFET sensing · Fig. 9
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
Selectivity normalised response for C2H2 at 625 ppbapproximately 0.5 normalised DeltaI/Iapprox +/- 0.1Figure Axis
Approximate
7 · Figure page · Fig. 9c
Selectivity normalised response for CH4 at 625 ppbapproximately 0.3 normalised DeltaI/Iapprox +/- 0.1Figure Axis
Approximate
7 · Figure page · Fig. 9c
Selectivity normalised response for CO at 625 ppbapproximately 3 normalised DeltaI/Iapprox +/- 0.1Figure Axis
Approximate
7 · Figure page · Fig. 9c
Selectivity normalised response for NO2 at 625 ppbapproximately 0.4 normalised DeltaI/Iapprox +/- 0.1Figure Axis
Approximate
7 · Figure page · Fig. 9c
Selectivity normalised response for SO2 at 625 ppbMarked as a best value within this paperapproximately 6 normalised DeltaI/Iapprox +/- 0.1Figure Axis
Approximate
7 · Figure page · Fig. 9c
SO2 sensitivity at about 1000 ppbMarked as a best value within this paperapproximately 4.2%approx +/- 0.3%Figure Axis
Approximate
7 · Figure page · Fig. 9b
SO2 sensitivity at 625 ppbapproximately 1.5%approx +/- 0.2%Figure Axis
Approximate
7 · Figure page · Fig. 9b

ChemFET transfer-characteristic SO2 sensing

Ni3HHTP2 MOF ChemFET channel on Au/SiO2/Si · Electrode

SO2 concentrations 625, 750, 875, 1000 and 1125 ppb; Vds = 0.5 V; transfer curves versus Vgs.

Atmosphere
dry air dilution; room temperature
Geometry
Ni3HHTP2 ChemFET with Au source/drain on Si/SiO2
Context
pristine Ni3HHTP2 MOF active channel
Measurement source
4 · 4 ChemFET sensing · Fig. 7
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
Approximate drain current at 1125 ppb SO2 and Vgs -10 Vapproximately 116 uAapprox +/- 3 uAVisual Estimate
Approximate
6 · Figure page · Fig. 7
Approximate drain current at 625 ppb SO2 and Vgs -10 Vapproximately 167 uAapprox +/- 3 uAVisual Estimate
Approximate
6 · Figure page · Fig. 7
Approximate drain current before SO2 exposure at Vgs -10 Vapproximately 172 uAapprox +/- 3 uAVisual Estimate
Approximate
6 · Figure page · Fig. 7
Gas chamber volumeapproximately 8 cm3approximatelyText
Approximate
4 · 4 ChemFET sensing
Sensing measurement temperature conditionroom temperatureText
Qualitative
4 · 4 ChemFET sensing
SO2 lower detection limitMarked as a best value within this paper625 ppb0.625 ppmText
Exact Reported
4 · 4 ChemFET sensing · Fig. 7
OSHA SO2 permissible exposure limit cited5 ppm5000 ppbText
Exact Reported
1 · Introduction

Dynamic SO2 sensing curve from supplementary information

Ni3HHTP2 MOF ChemFET channel on Au/SiO2/Si · Electrode

Dynamic SO2 sensing curve with labelled exposures at 1000, 875, 750 and 625 ppb in the SI plot.

Atmosphere
not specified in SI plot; main sensing experiments used dry air dilution at room temperature
Geometry
Ni3HHTP2 ChemFET
Context
pristine Ni3HHTP2 MOF active channel
Measurement source
1 · Supporting Supplementary · Figure 1
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
Supplementary dynamic minimum normalised response at 1000 ppb SO2approximately 1.2 normalised DeltaIapprox +/- 0.2Figure Axis
Approximate
1 · Supporting Supplementary · Figure 1
Supplementary dynamic minimum normalised response at 625 ppb SO2approximately 3.5 normalised DeltaIapprox +/- 0.3Figure Axis
Approximate
1 · Supporting Supplementary · Figure 1
Supplementary dynamic minimum normalised response at 750 ppb SO2approximately 3.2 normalised DeltaIapprox +/- 0.3Figure Axis
Approximate
1 · Supporting Supplementary · Figure 1
Supplementary dynamic minimum normalised response at 875 ppb SO2approximately 2.1 normalised DeltaIapprox +/- 0.2Figure Axis
Approximate
1 · Supporting Supplementary · Figure 1

SO2 repeatability test from supplementary information

Ni3HHTP2 MOF ChemFET channel on Au/SiO2/Si · Electrode

Repeatability cycling for Ni3HHTP2 sensor at 875 ppb SO2, plotted as normalised DeltaI versus time.

Atmosphere
not specified in SI plot; main sensing experiments used dry air dilution at room temperature
Geometry
Ni3HHTP2 ChemFET
Context
pristine Ni3HHTP2 MOF active channel
Measurement source
2 · Supporting Supplementary · Figure 2
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
Supplementary repeatability baseline normalised responseapproximately 4.3 normalised DeltaIapprox +/- 0.2Figure Axis
Approximate
2 · Supporting Supplementary · Figure 2
Supplementary repeatability cycle count at 875 ppb SO2three exposure/recovery cycles visibleVisual Estimate
Approximate
2 · Supporting Supplementary · Figure 2
Supplementary repeatability minimum normalised response at 875 ppb SO2approximately 2.2 normalised DeltaIapprox +/- 0.2Figure Axis
Approximate
2 · Supporting Supplementary · Figure 2

ChemFET SO2 sensing under varied Vds

Ni3HHTP2 MOF ChemFET channel on Au/SiO2/Si · Electrode

625 ppb SO2; Vds 0.2-0.5 V in 0.1 V steps before and after exposure.

Atmosphere
dry air dilution; room temperature
Geometry
Ni3HHTP2 ChemFET in gas chamber
Context
pristine Ni3HHTP2 MOF active channel
Measurement source
4 · 4 ChemFET sensing · Fig. 6
PropertyReported valueNormalised valueUncertaintyOrigin and qualitySource
Approximate SO2 response difference at Vds 0.2 Vapproximately 1-2 uA decrease at Vgs near 0 Vapprox +/- 1 uAVisual Estimate
Approximate
5 · Figure page · Fig. 6
Approximate SO2 response difference at Vds 0.5 VMarked as a best value within this paperapproximately 4-5 uA decrease at Vgs near 0 Vapprox +/- 1 uAVisual Estimate
Approximate
5 · Figure page · Fig. 6
Selected Vds for further SO2 sensingMarked as a best value within this paper0.5 VText
Exact Reported
4 · 4 ChemFET sensing · Fig. 6