Metal precursorsAu source/drain electrodes, 100 nm; Ti adhesion layer, 10 nm
SolventsAcetone; DI water; ethanol
AdditivesPhotoresist used for lithography/lift-off; silicon rubber well added after MOF growth for liquid testing
AtmosphereAmbient processing; final drying at 100 C
Temperature100
Time2
Substrate orientationSi (500 nm)/SiO2 (300 nm) wafer, 2.5 x 2 cm; channel length 50 um and width 1000 um
Work-upUltraviolet lithography and lift-off, magnetron sputtering of Ti/Au, brief ultrasonic acetone treatment, rinsing with DI water and ethanol, drying at 100 C for 2 h.
ActivationUV ozone treatment for about 1 h before MOF growth
Scalability contextDevice dimensions are explicitly reported; no scale-up beyond 2.5 x 2 cm wafer was demonstrated.
Show 5 structured reagent records
| Role | Reagent | Amount / concentration | Source |
|---|
| Other | Si (500 nm)/SiO2 (300 nm) wafer | 2.5 x 2 cm | p002 / article p.35936 · Experimental Section - Fabrication of the FET Device |
| Other | Ti layer | 10 nm | p002 / article p.35936 · Experimental Section - Fabrication of the FET Device |
| Other | Au layer | 100 nm | p002 / article p.35936 · Experimental Section - Fabrication of the FET Device |
| Solvent | acetone | ultrasound for a few seconds | p002 / article p.35936 · Experimental Section - Fabrication of the FET Device |
| Solvent | DI water and ethanol | rinse | p002 / article p.35936 · Experimental Section - Fabrication of the FET Device |