Synthesis evidence

Field-Effect Transistor Based on an in Situ Grown Metal-Organic Framework Film as a Liquid-Gated Sensing Device

Wang B., Luo Y., Liu B. et al. · ACS Applied Materials and Interfaces · 2019 · 35935-35940

9 structured synthesis routes

Completeness describes how fully the route could be reconstructed from the main article and supporting information.

Complete recipeSource: SI

Route 1: Drop Cast

p002 / SI p.S-2 · Drop-casting method · Figure S5d-f

Metal precursorsNi-MOF product prepared from NiCl2*6H2O under similar chemistry
Linker precursorsNi-MOF product prepared from HATP*6HCl under similar chemistry
SolventsDI water and ethanol for centrifugation/washing; ethanol for dispersion
AtmosphereOpen heated for reaction; vacuum oven drying and baking
Temperature65 reaction; 100 drying/baking
Time2 h reaction; 12 h powder drying; 2 h device baking
Substrate orientationDrop-cast onto FET channel
Work-upReacted product centrifuged three times with DI water and ethanol, dried in vacuum oven at 100 C for 12 h, mixed with ethanol, dropped onto FET channel, and baked at 100 C for 2 h.
Scalability contextDrop-cast nanosheets stacked into a non-uniform mass and adversely affected FET properties.
Show 3 structured reagent records
RoleReagentAmount / concentrationSource
Otherdried Ni-MOF powdersappropriate amountp002 / SI p.S-2 · Drop-casting method · Figure S5d-f
Solventethanoldispersion and washing solventp002 / SI p.S-2 · Drop-casting method · Figure S5d-f
SolventDI waterwashing solventp002 / SI p.S-2 · Drop-casting method · Figure S5d-f
Complete recipeSource: Main

Route 2: Other

p002 / article p.35936 · Experimental Section - Fabrication of the FET Device

Metal precursorsAu source/drain electrodes, 100 nm; Ti adhesion layer, 10 nm
SolventsAcetone; DI water; ethanol
AdditivesPhotoresist used for lithography/lift-off; silicon rubber well added after MOF growth for liquid testing
AtmosphereAmbient processing; final drying at 100 C
Temperature100
Time2
Substrate orientationSi (500 nm)/SiO2 (300 nm) wafer, 2.5 x 2 cm; channel length 50 um and width 1000 um
Work-upUltraviolet lithography and lift-off, magnetron sputtering of Ti/Au, brief ultrasonic acetone treatment, rinsing with DI water and ethanol, drying at 100 C for 2 h.
ActivationUV ozone treatment for about 1 h before MOF growth
Scalability contextDevice dimensions are explicitly reported; no scale-up beyond 2.5 x 2 cm wafer was demonstrated.
Show 5 structured reagent records
RoleReagentAmount / concentrationSource
OtherSi (500 nm)/SiO2 (300 nm) wafer2.5 x 2 cmp002 / article p.35936 · Experimental Section - Fabrication of the FET Device
OtherTi layer10 nmp002 / article p.35936 · Experimental Section - Fabrication of the FET Device
OtherAu layer100 nmp002 / article p.35936 · Experimental Section - Fabrication of the FET Device
Solventacetoneultrasound for a few secondsp002 / article p.35936 · Experimental Section - Fabrication of the FET Device
SolventDI water and ethanolrinsep002 / article p.35936 · Experimental Section - Fabrication of the FET Device
Partial recipeSource: Both

Route 3: Other

p004 / article p.35938 · Result and Discussion · Table 1 and Figure S8

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water; DI water and ethanol for washing
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time2
Substrate orientationCleaned FET suspended upside-down at the liquid surface of the reaction solution
Work-upSame in situ procedure as shorter-time devices; detailed washing/drying inferred from main experimental route.
ActivationUV ozone pretreatment before MOF growth.
Scalability contextLonger reaction damaged Au electrodes and decreased electrical performance.
Show 3 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp004 / article p.35938 · Result and Discussion · Table 1 and Figure S8
LinkerHATP*6HCl10.0 mg, 0.028 mmolp004 / article p.35938 · Result and Discussion · Table 1 and Figure S8
BaseNH3*H2O0.3 mLp004 / article p.35938 · Result and Discussion · Table 1 and Figure S8
Complete recipeSource: Both

Route 4: Other

p003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water, 5 mL for nickel solution and 5 mL for linker solution; DI water and ethanol for washing
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time0.25
Substrate orientationCleaned FET suspended upside-down at the liquid surface of the reaction solution
Work-upCool to room temperature; wash with a large amount of DI water and ethanol multiple times; dry in vacuum oven at 100 C for 2 h.
ActivationFET pretreated by UV ozone cleaner for about 1 h to remove organic impurities and increase hydroxyl groups.
Scalability contextNo scale-up study reported.
Show 4 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
LinkerHATP*6HCl10.0 mg, 0.028 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
BaseNH3*H2O0.3 mLp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
SolventDI water10 mL totalp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Complete recipeSource: Both

Route 5: Other

p003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water, 5 mL for nickel solution and 5 mL for linker solution; DI water and ethanol for washing
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time0.5
Substrate orientationCleaned FET suspended upside-down at the liquid surface of the reaction solution
Work-upCool to room temperature; wash with a large amount of DI water and ethanol multiple times; dry in vacuum oven at 100 C for 2 h.
ActivationFET pretreated by UV ozone cleaner for about 1 h to remove organic impurities and increase hydroxyl groups.
Scalability contextNo scale-up study reported.
Show 4 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
LinkerHATP*6HCl10.0 mg, 0.028 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
BaseNH3*H2O0.3 mLp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
SolventDI water10 mL totalp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Complete recipeSource: Both

Route 6: Other

p003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water, 5 mL for nickel solution and 5 mL for linker solution; DI water and ethanol for washing
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time0.083
Substrate orientationCleaned FET suspended upside-down at the liquid surface of the reaction solution
Work-upCool to room temperature; wash with a large amount of DI water and ethanol multiple times; dry in vacuum oven at 100 C for 2 h.
ActivationFET pretreated by UV ozone cleaner for about 1 h to remove organic impurities and increase hydroxyl groups.
Scalability contextAuthors report large-area, uniform film formation on the wafer, but no independent scale-up study.
Show 5 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
LinkerHATP*6HCl10.0 mg, 0.028 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
BaseNH3*H2O0.3 mLp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
SolventDI water10 mL totalp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Solventethanolwash solventp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Complete recipeSource: Both

Route 7: Other

p003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water, 5 mL for nickel solution and 5 mL for linker solution; DI water and ethanol for washing
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time1
Substrate orientationCleaned FET suspended upside-down at the liquid surface of the reaction solution
Work-upCool to room temperature; wash with a large amount of DI water and ethanol multiple times; dry in vacuum oven at 100 C for 2 h.
ActivationFET pretreated by UV ozone cleaner for about 1 h to remove organic impurities and increase hydroxyl groups; silicon rubber well added after drying for liquid tests.
Scalability contextThe film almost completely covered the silicon wafer surface; no larger scale was tested.
Show 5 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
LinkerHATP*6HCl10.0 mg, 0.028 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
BaseNH3*H2O0.3 mLp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
SolventDI water10 mL totalp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Solventethanolwash solventp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Partial recipeSource: Main

Route 8: Other

p003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water; DI water and ethanol for washing
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time1
Substrate orientationPure Si/SiO2 wafer without gold plating
Work-upSame procedure as Au-patterned in situ samples; washing and drying as described for Ni-MOF-FET.
ActivationUV ozone treatment presumed from same procedure.
Show 3 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
LinkerHATP*6HCl10.0 mg, 0.028 mmolp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
BaseNH3*H2O0.3 mLp003 / article p.35937 · Experimental Section - Fabrication of the Ni-MOF-FET Device
Complete recipeSource: SI

Route 9: Other

p002 / SI p.S-2 · Scooping-up method · Figure S5a-c

Metal precursorsNiCl2*6H2O (6.6 mg, 0.019 mmol)
Linker precursorsHATP*6HCl (10.0 mg, 0.028 mmol)
SolventsDI water, 5 mL for nickel solution and 5 mL for linker solution
AdditivesNH3*H2O, 0.3 mL
AtmosphereOpen heated in water bath; atmosphere otherwise not specified
Temperature65
Time0.25
Substrate orientationCleaned Au-patterned Si/SiO2 wafer used to transfer film after cooling
Work-upAfter cooling to room temperature, film was transferred to wafer and dried in a vacuum oven at 100 C for 2 h.
Scalability contextTransfer route gave cracked films and poor electrical properties.
Show 4 structured reagent records
RoleReagentAmount / concentrationSource
Metal SourceNiCl2*6H2O6.6 mg, 0.019 mmolp002 / SI p.S-2 · Scooping-up method · Figure S5a-c
LinkerHATP*6HCl10.0 mg, 0.028 mmolp002 / SI p.S-2 · Scooping-up method · Figure S5a-c
BaseNH3*H2O0.3 mLp002 / SI p.S-2 · Scooping-up method · Figure S5a-c
SolventDI water10 mL totalp002 / SI p.S-2 · Scooping-up method · Figure S5a-c