Complete recipeSource: Main
Route 1: Other
8 · Experimental Section / Fabrication of Chips with Prepatterned Electrodes · Figure 4a-c
Metal precursorsTi and Au evaporated electrodes
SolventsDimethylsulfoxide for lift-off; phosphoric acid for oxide etch
AdditivesAZ2020nlof and AZ1505 photoresists; Al2O3 passivation
Temperature110 soft bake; 55 oxide etch
TimeElectrode fabrication multistep; MOF film standard synthesis at 45 min for representative device
Substrate orientationFused silica/glass chip with central contacts and outer gold pads; Al2O3 insulating layer between chip and film.
Work-upUV lithography, Ti/Au evaporation, lift-off, plasma-enhanced ALD Al2O3, wet etching of contact/probe openings, wafer dicing.
Show 5 structured reagent records
| Role | Reagent | Amount / concentration | Source |
|---|---|---|---|
| Other | fused silica wafer | 4 inches, 500 um thickness | 8 · Experimental Section / Fabrication of Chips with Prepatterned Electrodes · Figure 4a-c |
| Other | AZ2020nlof resist | spin-coated 4000 rpm, 40 s | 8 · Experimental Section / Fabrication of Chips with Prepatterned Electrodes · Figure 4a-c |
| Other | Ti/Au | Ti 5 nm; Au 50 nm | 8 · Experimental Section / Fabrication of Chips with Prepatterned Electrodes · Figure 4a-c |
| Other | Al2O3 | 50 nm · plasma-enhanced atomic layer deposition | 8 · Experimental Section / Fabrication of Chips with Prepatterned Electrodes · Figure 4a-c |
| Acid | phosphoric acid | 85%, 55 C for 105 s · 85% | 8 · Experimental Section / Fabrication of Chips with Prepatterned Electrodes · Figure 4a-c |